Best Research Support Award
Masaaki Moriyama (Nanofabrication Platform, Hands-on-access fab. usage, Tohoku Univ. Micro System Integration center)
"Ultraprecise shape control technology by Si Deep-RIE"
Awards for technical staff in 2014
- 2022年5月17日
Best Research Support Award
Masaaki Moriyama (Nanofabrication Platform, Hands-on-access fab. usage, Tohoku Univ. Micro System Integration center)
"Ultraprecise shape control technology by Si Deep-RIE"