【公開日：2023.07.31】【最終更新日：2023.05.16】
課題データ / Project Data
課題番号 / Project Issue Number
22MS5038
利用課題名 / Title
comparison of surface rougness profile
利用した実施機関 / Support Institute
自然科学研究機構 分子科学研究所
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）物質・材料合成プロセス/Molecule & Material Synthesis（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）マテリアルの高度循環のための技術/Advanced materials recycling technologies（副 / Sub）-
キーワード / Keywords
Surface activated bonding, surface roughness, Nd:YAG crystal, atomic force microscope, optical profilometer
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
Kausas Arvydas
所属名 / Affiliation
自然科学研究機構分子科学研究所社会連携研究部門
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
KOBAYASHI Jun
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
MINATO Taketoshi
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
In this work we measured the surface roughness of Nd:YAG crystals used for surface activated bonding experiments. Comparison between atomic force microscope (AFM) and optical profilometer Zygo NexView 8000 series is performed. And results are discussed it terms of evaluation rules for surface profile measurements of crystals used for bonding or other purposes.
実験 / Experimental
Two Nd:YAG crystals were used for evaluation of surface roughness profile. This measurement is necessary in order to sample be ready for bonding process. The bonding process consist of sample irradiation with argon gas in vacuum environment by fast atom bombardment method. Once the samples are irradiated, the native oxide layer is removed and amorphous layer is created. This amorphous layer facilitates the bonding process, once two crystals touch each other. Therefore, material used in bonding should have good surface roughness Ra in order below 1 nm to have a good and reliable bond. In order to evaluate the surface roughness parameter tools like Atomic Force microscope (AFM) or Optical Profilometer (OP) could be used. The former has higher resolution and higher lateral sampling rate (19.5 nm) while the later has 0.1 optical resolution and 82 nm lateral sampling rate. Because of the wide usage in IMS the machine time of AFM is limited and waiting is required, therefore proper planning is required. On the other hand, the OP machine could be used almost anytime. We evaluated the surface profile by using both machines. In the case of OP the measurement area was 84 x 84 µm2 area with Ra equal to 0.258 nm. The same crystal was then evaluated by AFM machine on 5 x 5 µm2 area with roughness equal to 0.07 nm.
結果と考察 / Results and Discussion
Learn to use atomic force microscope and understand its operational principles. The authors did the measurement with the AFM microscope and understood it advantages and disadvantages for future experiments, where surface evaluation is necessary.Compare the measurement data between AFM and optical profilometer. The authors compared the measured data of surface profile of Nd:YAG samples. By use of AFM machine more finer structure with 19.7 nm lateral resolution could be obtained. On the other hand, more faster measurements with 82 nm lateral resolution are available by Zygo optical profilometer.Investigate the surface modification in Nd:YAG sample after 8 min argon gas irradiation by fast atom bombardment. The authors did the initial evaluation of surface profile of Nd:YAG samples before and after argon fast atom irradiation. Although 10% change was visible by both evaluation devices, it is still to investigate deeper the effect on the surface morphology. Additional discussion and planning are necessary. Provide guidelines for surface evaluation for future measurements. The authors suggest to use Zygo optical profilometer for most of the application where surface profile for bonded crystal is necessary (obtaining initial evaluation for bonding, purchasing new material for bonding). For applications like surface morphology modification during argon gas activation authors suggest to use more precise measurement tool like AFM.
図・表・数式 / Figures, Tables and Equations
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件