【公開日：2024.07.25】【最終更新日：2024.07.03】
課題データ / Project Data
課題番号 / Project Issue Number
23TT0003
利用課題名 / Title
微細加工技術による立体サンプル形成および高度デバイス化
利用した実施機関 / Support Institute
豊田工業大学 / Toyota Tech.
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者）/Internal Use (by ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）計測・分析/Advanced Characterization
【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）次世代バイオマテリアル/Next-generation biomaterials
キーワード / Keywords
MEMS/NEMSデバイス/ MEMS/NEMS device,光学顕微鏡/ Optical microscope,膜加工・エッチング/ Film processing/etching,流路デバイス/ Fluidec Device,光リソグラフィ/ Photolithgraphy,細胞培養デバイス/ Cell Culture Device
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
Qingyang Liu
所属名 / Affiliation
豊田工業大学 大学院工学研究科
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
大槻浩,佐々木実
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）,技術補助/Technical Assistance
利用した主な設備 / Equipment Used in This Project
TT-006：マスクアライナ装置
TT-011：Deep Reactive Ion Etching装置（Boschプロセス）
TT-009：シリコン専用の各種熱処理（酸化、拡散）装置一式
TT-018：非接触３次元表面形状・粗さ測定機
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
Microarrays of bio-samples are necessary in many research fields such as medicine, biology, cell diagnostics and so on. Last year, the authors’ team proposed the MEMS nozzle device, which can trap and release over 100 lily pollens at the same time without using the liquid for avoiding their germination (22TT0002). Figure 1(a) shows the schematic drawing. The release of pollens is their fixation in array on the culture media supplying the useful sample for the bio experiment. The effect of plasma-treated water is statistically measured in one experiment. On the other hand, the nozzle has the sharp right-angle corner, which can generate the air flow separation during the capture process. Figure 1(b) shows the case of rounded corner. The air flow will bend smoothly attracting the surrounding pollens more efficiently. Another merit is that the stress generated by the mechanical contact with the cell will be reduced. In this study, the nozzle is improved to round the corner.
実験 / Experimental
New fabrication of the nozzle includes the rounding steps of the corner. The starting material is a 200 μm-thick Si wafer mirror-polished at double sides. The first step newly introduced is the phosphorus diffusion into the top surface. This heavily-doped layer uses for enhancing the oxidation. The following steps are same with that of the previous one. MEMS nozzle is fabricated by photolithography and deep reactive ion etching. The through holes are arrayed in 12x12 matrix with 500 μm pitch. Each Φ42 μm-through hole has 150, 110, or 78 μm-diameter counterbore designed for capturing the pollens with different sizes. The subsequent step newly introduced is the oxidation. The heavily-doped Si layer will have the thicker oxide layer, which is later removed by HF wet etching. This result is the corner rounding.Figure 2 shows the micrograph of the white light interferometer. Figure 2(a) and 2(b) show the hole without and with the rounded process, respectively. Notice that the vertical color scale in Fig. 2(b) is larger height than that in Fig. 2(a) more than 17 times. This clearly show the rounding corner.
結果と考察 / Results and Discussion
In this work, the improved MEMS nozzle with rounded corners is proposed. To achieve the fabrication of this device, the phosphorus diffusion and the oxidation are respectively introduced before and after the normal fabrication process which includes photolithography and deep reactive ion etching. Using the improved nozzle, separated >100 pollens can be successfully captured and released in array on the gelatin, which will increase the efficiency of the bio-experiments.
図・表・数式 / Figures, Tables and Equations
Fig. 1 Trapping pollens and nozzle corners. (a)normal nozzle and (b)nozzle with rounded corners.
Fig. 2 Micrograph of the white light interferometer of (a)normal and (b)rounded holes.
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
Acknowledgments This work is supported by the grants from the joint usage/research program of center for Low-temperature Plasma Science, Nagoya University, with the cooperation of Research Center for Smart Photons and Materials, Toyota Technological Institute, Japan.
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- Qingyang Liu, Hiromasa Tanaka, Minoru Sasaki, Rounding MEMS nozzle corner for trapping pollens as microarray 16th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials / 17th International Conference on PlaΦsma-Nano Technology and Science, (2024.3.5, Nagoya) P1306
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件