【公開日：2024.07.25】【最終更新日：2024.06.04】

課題データ / Project Data

課題番号 / Project Issue Number

23TU0024

利用課題名 / Title

Thermoelectric generators

利用した実施機関 / Support Institute

東北大学 / Tohoku Univ.

機関外・機関内の利用 / External or Internal Use

内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-

【重要技術領域 / Important Technology Area】（主 / Main）革新的なエネルギー変換を可能とするマテリアル/Materials enabling innovative energy conversion（副 / Sub）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed

キーワード / Keywords

Energy harvester,MEMS/NEMSデバイス/ MEMS/NEMS device,熱電材料/ Thermoelectric material,熱電発電/ Thermoelctric Power Generation

利用者と利用形態 / User and Support Type

利用者名（課題申請者）/ User Name (Project Applicant)

Nguyen Toan

所属名 / Affiliation

Graduate School of Engineering, Tohoku University

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

Takahito Ono,Masaya Toda

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

利用形態 / Support Type

（主 / Main）機器利用/Equipment Utilization（副 / Sub）-

利用した主な設備 / Equipment Used in This Project

TU-058：マスクレスアライナ
TU-158：芝浦スパッタ装置（加熱型）
TU-159：芝浦スパッタ装置（冷却型）
TU-201：DeepRIE装置#1
TU-216：Vapor HFエッチング装置

報告書データ / Report

概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)

This work aims to develop a self-powered wireless IoT sensing system driven by daily ambient temperature energy harvesting.

実験 / Experimental

A novel approach using a thermoelectric generator (TEG) which harvests thermal energy from daily ambient temperature fluctuations into electricity as a power source for wireless IoT devices is proposed and investigated. A harvested temperature difference across the TEG is created by employing a phase change material (PCM) which allows the temperature value to be maintained near the melting point at the phase transition during the ambient temperature fluctuations.
TEG was made using MEMS technology. Electrodes were deposited by sputtering, photoresist patterned using a maskless aligner, and etched using RIE.

結果と考察 / Results and Discussion

Fig. 1. is a fabricated Self-powered wireless IoT sensing transmitter module and the receiver module.
Experimental results indicated that the harvested temperature differences are 10℃ and 5℃ for 300 ml and 30 ml of PCM, respectively, during the ambient temperature variations from 5℃ to 25℃. By utilizing the ambient temperature fluctuations between day and night times, an average maximum output power of TEG measured for 3 days is 340 µW and DC-DC electronic conversion efficiency is 28.3%. The total storable energy of approximately 1.46 J for a day is estimated. A capacitor as an energy storage unit could be fully charged and its usable energy is calculated at 0.686 J. The current consumption of 2.1 µA for every transmit cycle is estimated. A self-powered wireless IoT sensing system driven by realistic ambient temperature variations able to sense the ambient temperature as well as the ambient humidity and transmit to a computer via RF communication is demonstrated successfully.

図・表・数式 / Figures, Tables and Equations

Fig. 1. (a) Fabricated Self-powered wireless IoT sensing transmiter module. (b) Receiver module.

その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)

・参考文献
Energy reports, 6, 2022-2029, 2020.
International journal of energy research, 45, 15557-15568, 2021.
Applied Energy, 311, 118679, 2022.
Nano energy, 121, 109186, 2024.

成果発表・成果利用 / Publication and Patents

論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)

口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.

特許 / Patents

特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件