【公開日：2025.04.01】【最終更新日：2025.04.01】

課題データ / Project Data

課題番号 / Project Issue Number

22HK0096

利用課題名 / Title

Development of label-free nanoplasmonic biosensing platforms for commercial applications

利用した実施機関 / Support Institute

北海道大学 / Hokkaido Univ.

機関外・機関内の利用 / External or Internal Use

外部利用/External Use

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）計測・分析/Advanced Characterization

【重要技術領域 / Important Technology Area】（主 / Main）量子・電子制御により革新的な機能を発現するマテリアル/Materials using quantum and electronic control to perform innovative functions（副 / Sub）-

キーワード / Keywords

電子顕微鏡/Electron microscopy,膜加工・エッチング/Film processing and Etching,スパッタリング/Sputtering,ALD,EB,フォトニクス/ Photonics

利用者と利用形態 / User and Support Type

利用者名（課題申請者）/ User Name (Project Applicant)

Lee Kuang-li

所属名 / Affiliation

Academia Sinica, Biomedical Translation Research Center

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

三澤 弘明

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

松尾 保孝,石 旭

利用形態 / Support Type

（主 / Main）共同研究/Joint Research（副 / Sub）,機器利用/Equipment Utilization

利用した主な設備 / Equipment Used in This Project

HK-603：超高速スキャン電子線描画装置(130kV)
HK-620：ICP高密度プラズマエッチング装置（フッ素）
HK-616：原子層堆積装置
HK-609：ヘリコンスパッタリング装置
HK-625：高分解能電界放射型走査型電子顕微鏡

報告書データ / Report

概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)

Nanostructure-based surface plasmon resonance (SPR) sensors are capable of sensitive, real-time, label-free, and multiplexed detection and have been employed in applications including medical diagnostics, environmental monitoring, and food safety. However, the development of highly sensitive plasmonic biosensors is an important issue. In this study, the localized surface plasmon resonance (LSPR) and long-range surface plasmon resonance (LRSPR) modes on gold nanogratings were studied by measuring reflection spectra. The wavelength sensitivities of these modes were compared. The simulation results show that the LSPR mode has a higher wavelength sensitivity. A 10-nm-thick alumina caused a 92-nm wavelength shift for the LSPR mode, whichis 4 times higher than that of the SPR mode.

実験 / Experimental

Gold nanogratings are fabricated using electron beam lithography, dry etching and RF sputter deposition techniques. Silicon nanogratings with groove widths from 50 to 200 nm, groove depths from 10 to 60 nm and periods from 200 to 500 nm were firstly fabricated using electron beam lithography (ELS-F130, Elionix, Japan) and an inductively coupled plasma (ICP) etching system (SAMCO). After depositing a 50-nm-thick gold film on the silicon nanostructure using RF sputter deposition techniques, the gold nanogratings were made.

結果と考察 / Results and Discussion

Fig. 1 shows the silicon nanogratings with various periods from 200 to 500 nm and a groove width of 30 nm. After depositing a 50-nm-thick gold film, these gold nanostructures will be utilized to study various resonance modes by measuring reflection spectra. In addition, the wavelength sensitivities of the SPR and LSPR modes will be compared by depositing a thin alumina film.

図・表・数式 / Figures, Tables and Equations

Figure 1. SEM images of the silicon nanogratings with various periods andgroove widths.

その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)

成果発表・成果利用 / Publication and Patents

論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)

口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.

特許 / Patents

特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件