【公開日：2023.07.31】【最終更新日：2023.04.27】
課題データ / Project Data
課題番号 / Project Issue Number
22WS0093
利用課題名 / Title
Ti/Cu layer deposition on the polycarbonate template by using Ion Beam Sputtering System
利用した実施機関 / Support Institute
早稲田大学 / Waseda Univ.
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）計測・分析/Advanced Characterization
【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）-
キーワード / Keywords
Film formation, Surface treatment, Observation of shape and forms, Analysis,電子顕微鏡/Electron microscopy,集束イオンビーム/Focused ion beam,スパッタリング/Sputtering
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
Mahmudul HASAN
所属名 / Affiliation
Research Organization for Nano & Life Innovation, Waseda University
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
Katsumi HOSHINO,Yoshito NOZAKI
利用形態 / Support Type
（主 / Main）技術代行/Technology Substitution（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
WS-001：イオンビームスパッタ装置
WS-010：集束イオン/電子ビーム加工観察装置
WS-012：電界放出型 走査電子顕微鏡
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
Ti/Cu layer on the polycarbonate template was used to synthesise CoPt nanowires. The FE-SEM (Hitachi SU-8240) and FIB-SEM were used to check CoPt nanowires.
実験 / Experimental
Ti (2.5 nm)/Cu (400 nm) layer was deposited on one side of the polycarbonate template using the Ion Beam Sputtering System and synthesized CoPt nanowires by electrodeposition. CoPt nanowires were dispersed on the Si substrate by the drop cast process. Then the CoPt nanowires were covered with a carbon layer. Then FE-SEM and FIB-SEM were conducted to observe the nanowires.
結果と考察 / Results and Discussion
The CoPt nanowires were prepared by applying -1000 mV vs Ag/AgCl (sat. KCl) potential. From the FE-SEM image, the nanowire length is 27 µm (Fig. 1a) with a cylinder-like shape. The cross-section FIB-SEM image showed nanowires had a 100 nm diameter (Fig. 1b). There is no hollow on the inside of the nanowires, and the bright colour in Fig. 1b indicates the presence of a metallic layer.
図・表・数式 / Figures, Tables and Equations
Fig.1 (a) FE-SEM and (b) cross-section FIB-SEM image of CoPt nanowires
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- Md. Mahmudul Hasan, M. Saito, T. Huang, Y. Takamura, K. Yamada, D. Araki, S. Kasai, Y. Sonobe, D. Oshima, K. Kato, S. Nakagawa, T. Ono, T. Homma. Preparation and evaluation of electrodeposited CoPt nanowires for 3D magnetic memory, The 147 Conf. The Surface Finishing Society in Japan, Abstract book for the 147th SFJ conf., Mar. 2023.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件