利用報告書 / User's Reports


【公開日:2024.07.25】【最終更新日:2024.06.17】

課題データ / Project Data

課題番号 / Project Issue Number

23UT0378

利用課題名 / Title

薄膜光学定数測定

利用した実施機関 / Support Institute

東京大学 / Tokyo Univ.

機関外・機関内の利用 / External or Internal Use

内部利用(ARIM事業参画者以外)/Internal Use (by non ARIM members)

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】(主 / Main)計測・分析/Advanced Characterization(副 / Sub)-

【重要技術領域 / Important Technology Area】(主 / Main)高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed(副 / Sub)-

キーワード / Keywords

フォトニクスデバイス/ Nanophotonics device,エリプソメトリ/ Ellipsometry


利用者と利用形態 / User and Support Type

利用者名(課題申請者)/ User Name (Project Applicant)

陳 牧心

所属名 / Affiliation

東京大学大学院工学系研究科機械工学専攻

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

Ying-Tsung Lee,Zhiyu Wang

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type

(主 / Main)機器利用/Equipment Utilization(副 / Sub)-


利用した主な設備 / Equipment Used in This Project

UT-303:分光エリプソメータ


報告書データ / Report

概要(目的・用途・実施内容)/ Abstract (Aim, Use Applications and Contents)

This study focuses on enhancing the spectral and CPL selectivity of chiral metasurfaces utilizing its 2D extrinsic chirality in the UV region. The chiral metasurface is made of HfO2. The optical properties of HfO2 thin film  were characterized by the ellipsometer.

実験 / Experimental

The ellipsometer was used to measure the refractive index, extinction coefficient, and the thin film thickness of the HfO2. The measured properties of HfO2 were then applied for the simulation of HfO2 extrinsic chiral metasurface. 

結果と考察 / Results and Discussion

We have demonstrated an eccentric ring-shaped metasurface with a simple 2D geometry in meta-atoms, exhibiting a narrowband and large chiroptical response under oblique incidence in the UV region. This work highlights the superiority of extrinsic 2D chirality in the narrowband CPL filtering, showcasing the narrowest FWHM and the highest chiral dissymmetry in the UV region.

図・表・数式 / Figures, Tables and Equations


Refractive index and extinction coefficient of HfO2


その他・特記事項(参考文献・謝辞等) / Remarks(References and Acknowledgements)


成果発表・成果利用 / Publication and Patents

論文・プロシーディング(DOIのあるもの) / DOI (Publication and Proceedings)
  1. Ying-Tsung Lee, Effects of metasurface geometry on magnetic dipole resonances for circular asymmetric transmission in the ultraviolet region, Applied Physics Letters, 123, (2023).
    DOI: 10.1063/5.0181224
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents

特許出願件数 / Number of Patent Applications:0件
特許登録件数 / Number of Registered Patents:0件

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