【公開日：2024.07.25】【最終更新日：2024.03.28】

課題データ / Project Data

課題番号 / Project Issue Number

23NM5426

利用課題名 / Title

Synthesis and Integration of 2D materials for high-performance

利用した実施機関 / Support Institute

物質・材料研究機構 / NIMS

機関外・機関内の利用 / External or Internal Use

内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-

【重要技術領域 / Important Technology Area】（主 / Main）量子・電子制御により革新的な機能を発現するマテリアル/Materials using quantum and electronic control to perform innovative functions（副 / Sub）-

キーワード / Keywords

Transistors, Chemical Vapor Deposition (CVD), 1D Nanoribbons, 2D Materials

利用者と利用形態 / User and Support Type

利用者名（課題申請者）/ User Name (Project Applicant)

Shisheng LI

所属名 / Affiliation

物質・材料研究機構

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

利用形態 / Support Type

（主 / Main）機器利用/Equipment Utilization（副 / Sub）-

利用した主な設備 / Equipment Used in This Project

NM-605：水蒸気プラズマ洗浄装置 [AQ-500 #1]
NM-606：UVオゾンクリーナー [UV-1]
NM-612：SiNプラズマCVD装置 [PD-220NL]
NM-649：FE-SEM+EDX [SU8230]

報告書データ / Report

概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)

The AFM and SEM are high-efficiency tools for studying the morphology of CVD-grown materials including the information on thickness, length, width, etc.

実験 / Experimental

AFM tapping mode and SEM were employed to study the morphology of as-grown 1D MoS2 nanoribbons grown on mechanically exfoliated h-BN flakes.

結果と考察 / Results and Discussion

AFM images of the as-grown 1D MoS2 nanoribbons have sharp and straight edges. The thickness of the MoS2 nanoribbon is ~0.7 nm, indicating a monolayer thickness. Since the Jupiter XR AFM can achieve the atomic resolution. It is promising to study the epitaxy relationship between the top MoS2 nanoribbon and bottom h-BN flakes in the future. SEM images show morphology at a large scope which can easily tell the length of the as-grown 1D MoS2 nanoribbons and how the width evolves during the growth process. Because of the precipitation of MoS2 from the Na-Mo-O-S droplets, the width of 1D MoS2 nanoribbons shrinks gradually. 

図・表・数式 / Figures, Tables and Equations

その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)

成果発表・成果利用 / Publication and Patents

論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)

口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.

特許 / Patents

特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件