【公開日：2024.07.25】【最終更新日：2024.06.25】
課題データ / Project Data
課題番号 / Project Issue Number
23NU0271
利用課題名 / Title
Green-synthesized CoFe2O4-based nanocomposites for Photodegradation; Fabrication of GMR thin film for biosensor applications
利用した実施機関 / Support Institute
名古屋大学 / Nagoya Univ.
機関外・機関内の利用 / External or Internal Use
外部利用/External Use
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）計測・分析/Advanced Characterization
【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）-
キーワード / Keywords
nanocomposite,GMR,センサ/ Sensor,走査プローブ顕微鏡/ Scanning probe microscope,スパッタリング/ Sputtering,X線回折/ X-ray diffraction
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
Suharyadi Edi
所属名 / Affiliation
Department of Physics, Gadjah Mada University, Indonesia
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
加藤 剛志
利用形態 / Support Type
（主 / Main）共同研究/Joint Research（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
NU-204：原子間力顕微鏡
NU-205：3元マグネトロンスパッタ装置
NU-213：8元マグネトロンスパッタ装置
NU-259：磁気特性評価システム群
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
We report the synthesis of nanocomposites including CoFe2O4/RGO, CoFe2O4/CDots, and Fe3O4/RGO/ZnO, successfully achieved through green synthesis utilizing Moringa oleifera and Amaranthus viridis leaf extracts. The nanocomposites were characterized using an X-ray diffractometer to determine their phase and crystal structure. The magnetic properties of the nanocomposites were investigated using a vibrating sample magnetometer, indicating that the samples exhibit soft ferromagnetic behavior. Additionally, fabrication of Ta/NiFe/Cu/CoFe/MnIr/Ta) spin valves (SVs) GMR thin films on Si/SiO2 substrate with NiFe thickness variations of 10 and 20 nm using radio frequency (RF) magnetron sputtering has been studied through magnetoresistance (MR) measurements. Furthermore, microfabrication of GMR sensors was conducted using photolithography.
実験 / Experimental
Fabrication of CoFe2O4/rGO
nanocomposites
Fabrication
of CoFe2O4/rGO nanocomposites consist of several steps as
illustrated in Figure 1. CoFe2O4 nanoparticles were
prepared through the simple co-precipitation method using precursors such as
CoCl2.6H2O, FeCl3.6H2O, NaOH, MO
extract solution, and distilled water as the solvent. Then, GO was synthesized
using a modified Hummer method via the oxidation of graphite employing
precursors such as graphite, sodium nitrate (NaNO3), sulfuric acid
(H2SO4), potassium permanganate (KMnO4), and
hydrogen peroxide (H2O2). The functionalized rGO was
green-synthesized using precursors such as GO, hydrazine hydrate (H6N2O),
AV extract solution, and distilled water as the solvent. Furthermore, green
synthesis of nanocomposite CoFe2O4/rGO was conducted
using CoFe2O4, rGO, and ethanol (CH3CH2OH)
as the solvent.
Fabrication
of CoFe2O4/Cdots nanocomposites
The fabrication process of the CoFe2O4/Cdots
nanocomposite involves several steps. Initially, CoFe2O4
nanoparticles are synthesized using the co-precipitation method. Subsequently,
Cdots are synthesized via the hydrothermal method. Finally, the green synthesis
of the CoFe2O4/Cdots nanocomposite is conducted. Fabrication
of Fe3O4/rGO/ZnO nanocomposites
Fabrication
of Fe3O4/rGO/ZnO nanocomposite involves several steps
such as synthesis of Fe3O4 nanoparticles using the
co-precipitation method with precursors FeCl3.6H2O, FeSO4.7H2O,
NH4OH, MO extract solution, and distilled water as the solvent.
Then, synthesis of GO, rGO, Fe3O4/rGO, followed by green
synthesis of Fe3O4/rGO/ZnO nanocomposite using the
precipitation method with precursors Fe3O4/rGO, (CH3COO)2Zn.2H2O,
NaOH, AV extract solution, and ethanol as the solvent.
Fabrication of GMR thin film
Fabrication
of [Si Substrate/SiO2/Ta (5 nm)/NiFe (10/20 nm)/Cu (2.5 nm)/CoFe (3
nm)/MnIr (10 nm)/Ta (3nm)] spin valves (SVs) GMR thin films with NiFe thickness
(t(NiFe)) variations of 10 and 20 nm [as shown in Figure 2(a)] using radio
frequency (RF) magnetron sputtering (NU-205, NU-213) has been studied through magnetoresistance
(MR) measurements (NU-259).Microfabrication of GMR sensor
The microfabrication procedure consists of several
steps, including photolithography, which comprises resist coating, exposure,
and development. Subsequently, ion milling (film etching and resist removal) is
conducted, followed by another round of photolithography for patterning, as
depicted in Figure 2 (b). Further, sputtering deposition is carried out to
deposit material for contact pads, followed by resist removal.
結果と考察 / Results and Discussion
Structural analysis The XRD patterns for CoFe2O4 and CoFe2O4/rGO nanocomposites are depicted in Fig. 2. As illustrated in Fig. 3(a), distinctive peaks were observed at 2θ = 30.2°, 35.6°, 43.2°, 53.6°, 57.1°, 62.7°, and 74.2°, corresponding to (220), (311), (422), (511), (440), (620), and (533) crystal planes. These peaks correspond to the Crystallography Open Database (COD) No.5910063, thereby confirming the existence of CoFe2O4 in a cubic spinel structure. The emergence of a broad rGO peak at 2θ = 25°, which is associated with the (002) lattice plane in the CoFe2O4/rGO nanocomposite (Figure 3 (b)-(f)), confirms the presence of rGO and CoFe2O4 nanoparticles. Magnetic properties Fig. 4 illustrates the magnetization curves of CoFe2O4 and CoFe2O4/rGO nanocomposites with varying rGO concentrations. Furthermore, as depicted in the inset of Fig. 4, the small coercivity indicates that the samples have soft ferromagnetic properties. Furthermore, the magnetic property studies of CoFe2O4/CDots and Fe3O4/RGO/ZnO nanocomposites also indicate soft ferromagnetic behavior. Magnetoresistance (MR) measurements The magnetoresistance (MR) of the SV thin film is 6.7% for NiFe 10 nm and 4.7% for NiFe 20 nm, as depicted in Figure 5. Microfabrication of GMR sensor Microfabrication has been successfully carried out using photolithography, resulting in the outcomes depicted in Figure 6.
図・表・数式 / Figures, Tables and Equations
Fig. 1. Schematic representation of CoFe2O4/rGO nanocomposites synthesis. (a) MO and AV extract solution, (b) green synthesis (GS) of CoFe2O4 using co-precipitation (c) synthesis of GO, (d) synthesis of rGO, and (e) GS of CoFe2O4/rGO.
Fig. 2. (a) Layer structure of SVs-GMR thin film and (b) microfabrication pattern of GMR sensor
Fig. 3. XRD patterns of (a) CoFe2O4 and CoFe2O4/rGO (b) 5:1, (c) 5:2 (d) 5:3, (e) 5:4, and (f) 5:5.
Fig. 4. Hysteresis loops of CoFe2O4 and CoFe2O4/rGO with various concentrations.
Fig. 5. Magnetoresistance ratio of (a) NiFe 10 nm and (b) NiFe 20 nm SV thin-film sensor.
Fig. 6. The microscope results of the microfabrication pattern.
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
・共同研究者：加藤 剛志 教授（名古屋大学 未来材料・システム研究所）
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
-
Muhammad Riswan, Electric Potential-Induced Localized Surface Plasmon Resonance of Fe3O4/Ag Composite Magnetic Nanoparticles, 2023 IEEE International Magnetic Conference - Short Papers (INTERMAG Short Papers), , 1-2(2023).
DOI: 10.1109/INTERMAGShortPapers58606.2023.10228490
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- Muhammad Riswan, Nanang Adrianto, Ilyas M. Yahya, Nurul I. Istiqomah, Andi M. Panre, Juharni, Sari Wahyuni, Muhammad Arifin, Iman Santoso, Daiki Oshima, Takeshi Kato, and Edi Suharyadi, Electric Potential-Induced Localized Surface Plasmon Resonance of Fe3O4/Ag Composite Magnetic Nanoparticles, Intermag Conference, 15-19 May 2023, Sendai Japan
- Dyah Ayu Larasati, Deska Lismawenning Puspitarum, Mahardika Yoga Darmawan, Nurul Imani Istiqomah, Juliasih Partini, Takeshi Kato, and Edi Suharyadi, Magnetic Hyperthermia Properties of Green Synthesized CoFe2O4/ZnS Nanocomposites utilizing Moringa Oleifera Extract, Intermag Conference, 15-19 May 2023, Sendai Japan
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件