【公開日：2024.07.25】【最終更新日：2024.04.16】
課題データ / Project Data
課題番号 / Project Issue Number
23NM5351
利用課題名 / Title
Haptic Human-Machine Interface Based on Liquid-Mediated Self-Assembly
利用した実施機関 / Support Institute
物質・材料研究機構 / NIMS
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）計測・分析/Advanced Characterization
【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）マテリアルの高度循環のための技術/Advanced materials recycling technologies
キーワード / Keywords
エレクトロデバイス/ Electronic device,電子顕微鏡/ Electronic microscope,資源使用量低減技術/ Technologies for reducing resource usage,高品質プロセス材料/技術/ High quality process materials/technique,蒸着・成膜/ Vapor deposition/film formation
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
李 玲穎
所属名 / Affiliation
物質・材料研究機構
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）,技術補助/Technical Assistance
利用した主な設備 / Equipment Used in This Project
NM-649：FE-SEM+EDX [SU8230]
NM-643：電子銃型蒸着装置 [UEP-3000BS]
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
This study explores the development of directed self-assembly processes utilizing a variety of functional micro-/nanomaterials. The aim is to enable sustainable manufacturing of soft electronic devices with high resolution and superior performance.
実験 / Experimental
To fabricate high-resolution soft electronics, we utilized liquid-mediated patterning technology. A submicron-scale photomask was created using an electron beam (EB) evaporator, imparting the soft substrates with a distinct surface differential. Functional inks were selectively assembled onto these substrates, forming soft devices after appropriate drying. The morphology and components of the patterned functional circuits were examined using a field emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectrometry (EDX).
結果と考察 / Results and Discussion
Following substrate modification with the submicron-scale photomask, we selectively enhanced the surface energy and polarity of designated regions on the polymer substrate. Upon spreading aqueous gold nanoparticle (AuNP) ink over the entire substrate, the functional ink adhered firmly to these regions and formed a functional circuit after room-temperature evaporation. The morphology of the patterned electrodes was investigated using FE-SEM and EDX. Our observations demonstrate that submicron-scale soft electrodes can be fabricated efficiently through an additive manufacturing process. This opens new possibilities for further research and application in soft electronic devices.
図・表・数式 / Figures, Tables and Equations
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- 李玲穎,李万里,金原正幸,三成剛生,"Directed Self-Assembly by Liquid-Solid Nonequilibrium Heterointerface for High-Resolution Soft Electronics" 第84回応用物理学会秋季学術講演会（熊本）. 令和5年9月22日
- Lingying Li, Wanli Li, Masayuki Kanehara, and Takeo Minari, "One-dimensional Hybrid Nanowires Patterning by Interfacial Architectonics for Soft Electronics" Solid State Devices and Materials (Nagoya),令和5年9月7日
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件