【公開日：2024.07.25】【最終更新日：2024.05.19】
課題データ / Project Data
課題番号 / Project Issue Number
23NM5150
利用課題名 / Title
熱電材料の基礎開発
利用した実施機関 / Support Institute
物質・材料研究機構 / NIMS
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）計測・分析/Advanced Characterization（副 / Sub）加工・デバイスプロセス/Nanofabrication
【重要技術領域 / Important Technology Area】（主 / Main）量子・電子制御により革新的な機能を発現するマテリアル/Materials using quantum and electronic control to perform innovative functions（副 / Sub）マテリアルの高度循環のための技術/Advanced materials recycling technologies
キーワード / Keywords
電子顕微鏡/ Electronic microscope,光学顕微鏡/ Optical microscope,X線回折/ X-ray diffraction,電子回折/ Electron diffraction,電子分光/ Electron spectroscopy,蒸着・成膜/ Vapor deposition/film formation,リソグラフィ/ Lithography,膜加工・エッチング/ Film processing/etching,ワイヤーボンディング/ Wire Bonding,原子薄膜/ Atomic thin film,資源使用量低減技術/ Technologies for reducing resource usage,未利用資源の有効利用技術/ Technologies for effective utilization of unused resources
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
森 孝雄
所属名 / Affiliation
物質・材料研究機構
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
Frank.F.Yun
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）,技術補助/Technical Assistance
利用した主な設備 / Equipment Used in This Project
NM-604：マスクレス露光装置 [DL-1000/NC2P]
NM-645：ICP-RIE装置 [CE300I]
NM-659：ワイヤーボンダー [7476D #1]
NM-654：触針式プロファイラー [Dektak 6M]
NM-648：FE-SEM+EDX [SU8000]
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
Nano fabrication is essential in the implementation of thermal conductivity measurements for in-plane thermal conductivity of thin films such as the 3-omega method. The purpose for the use of nano fabrication equipment is to design and optimize thin film heaters and structures to ensure high quality results of in-plane thermal conductivity measurements. The development of in-plane thin film measurement systems are essential in the understanding and enhancement of thin film thermoelectric devices.
実験 / Experimental
Experiments will be carried out to etch and pattern heater and sensor structures in conjunction with theoretically modeled systems to optimize measurement structures and enhance reliability and accuracy of measurements for in-plane thermal conductivity.
結果と考察 / Results and Discussion
Experiments and designs are still ongoing and underdevelopment to model and verify between theory and experiment, it is necessary to optimize the structures and materials to enhance reliability and accuracy of in-plane thermal conductivity measurements.
図・表・数式 / Figures, Tables and Equations
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- "Surface phonon dispersion measurement of novel 2D materials" MRM2023/IUMRS-ICA2023(KYOTO) DECEMBER 11-16 2023
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件