【公開日：2024.07.25】【最終更新日：2024.04.01】

課題データ / Project Data

課題番号 / Project Issue Number

23NM5012

利用課題名 / Title

Data-driven inorganic nanostructure design for thermal management and ionic conductors

利用した実施機関 / Support Institute

物質・材料研究機構 / NIMS

機関外・機関内の利用 / External or Internal Use

内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-

【重要技術領域 / Important Technology Area】（主 / Main）量子・電子制御により革新的な機能を発現するマテリアル/Materials using quantum and electronic control to perform innovative functions（副 / Sub）-

キーワード / Keywords

表面・界面・粒界制御/ Surface/interface/grain boundary control,原子薄膜/ Atomic thin film

利用者と利用形態 / User and Support Type

利用者名（課題申請者）/ User Name (Project Applicant)

ウー イェン ルー

所属名 / Affiliation

物質・材料研究機構

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

利用形態 / Support Type

（主 / Main）機器利用/Equipment Utilization（副 / Sub）-

利用した主な設備 / Equipment Used in This Project

NM-608：スパッタ装置 [JSP-8000]
NM-611：原子層堆積装置 [AD-230LP]

報告書データ / Report

概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)

The project seeks to advance the understanding of thermal conductivity in Al2O3 through innovative deposition techniques such as sputtering and Atomic Layer Deposition (ALD). The primary objective is to analyze and compare the thermal conductivity of Al2O3 using different methods, including direct sputtering on a substrate and sequential deposition with ALD Al2O3 followed by sputtering. Additionally, a heat absorption layer of Au is deposited on GeSn and Al2O3 samples for thermoreflectance measurements. This study aims to contribute valuable insights into optimizing thermal management through data-driven design strategies.

実験 / Experimental

The experimental approach involves the deposition of Al2O3 using both sputtering and ALD techniques. The thermal conductivity of Al2O3 is systematically explored through varied deposition methods, including direct sputtering onto a substrate and a sequential process involving ALD Al2O3 followed by sputtering. Furthermore, a crucial element of the experiment involves the deposition of a gold (Au) top layer on both GeSn and Al2O3 samples to serve as a heat absorption layer for thermoreflectance measurements. The ongoing thermal measurement phase is critical for obtaining comprehensive data on the thermal properties of the fabricated nanostructures.

結果と考察 / Results and Discussion

Preliminary findings indicate promising outcomes in the exploration of thermal conductivity in Al2O3 utilizing diverse deposition strategies. Comparative analyses between direct sputtering and the combined ALD Al2O3-sputtering approach reveal distinct thermal behavior. The deposition of Au as a top layer on GeSn and Al2O3 samples is anticipated to enhance heat absorption, facilitating accurate thermoreflectance measurements. The ongoing thermal measurement phase is expected to provide a comprehensive dataset for a thorough discussion of the observed trends and potential applications of the developed nanostructures in thermal management. The results and discussions will further contribute to the evolving landscape of data-driven inorganic nanostructure design for enhanced thermal management.

図・表・数式 / Figures, Tables and Equations

その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)

成果発表・成果利用 / Publication and Patents

論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)

口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.

特許 / Patents

特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件