【公開日：2024.07.25】【最終更新日：2024.07.01】
課題データ / Project Data
課題番号 / Project Issue Number
23HK0059
利用課題名 / Title
Measuring the energy distribution of plasmon-excited hot electrons by photoemission electron microscopy
利用した実施機関 / Support Institute
北海道大学 / Hokkaido Univ.
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）計測・分析/Advanced Characterization
【重要技術領域 / Important Technology Area】（主 / Main）量子・電子制御により革新的な機能を発現するマテリアル/Materials using quantum and electronic control to perform innovative functions（副 / Sub）革新的なエネルギー変換を可能とするマテリアル/Materials enabling innovative energy conversion
キーワード / Keywords
蒸着・成膜/ Vapor deposition/film formation,ALD,スパッタリング/ Sputtering,電子線リソグラフィ/ EB lithography,電子顕微鏡/ Electronic microscope,光学顕微鏡/ Optical microscope,原子薄膜/ Atomic thin film,フォトニクス/ Photonics,量子効果/ Quantum effect,表面・界面・粒界制御/ Surface/interface/grain boundary control,太陽電池/ Solar cell,電極材料/ Electrode material
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
QIAO Lin
所属名 / Affiliation
北海道大学 電子科学研究所
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
三澤弘明,松尾保孝,石旭
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
HK-616：原子層堆積装置
HK-611：多元スパッタ装置
HK-405：時間分解収差補正光電子顕微鏡システム
HK-603：超高速スキャン電子線描画装置(130kV)
HK-609：ヘリコンスパッタリング装置
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
In recent years, it has been reported that the quantum coherence occurs due to the strong coupling by using a nanocavity composed by Au nanodisks on the TiO2/Au-film. Based on the previous research, we fabricated various kinds of nanocavities and the energy distribution of the plasmon-excited hot electrons of these nanocavities is systematically investigated by combining the femtosecond pulsed laser and the photoemission electron microscopy (PEEM).
実験 / Experimental
The TiO2 and Au film were deposited by the atomic layer deposition (ALD) and the helicon sputtering, separately. The nanoblocks of different metals, including Au, Ag, and Pt, were fabricated by the electron-beam lithography followed by multi-sputtering. The topography is measured by scanning electron microscope (SEM). The near field spectra and the energy distribution of the samples was investigated by PEEM which is combined with a femtosecond pulsed laser system.
結果と考察 / Results and Discussion
To investigate the energy distribution of the plasmon-excited hot electrons, the Au, Ag, and Pt nanoblocks were prepared as the model system and measured by PEEM. Corresponding to the wavelength of the excitation laser, the size of the Au, Ag, and Pt nanoblocks were optimized in the range of 170nm-230nm, 150nm-210nm and 140nm-200nm respectively. The near field spectra were measured by exiting the Au, Ag, and Pt nanoblocks with a laser beam of the wavelength of 700nm-900nm. And it is found that the intensity and the peak position are strongly related to the kinds of the metals and the size of the nanoblocks. Then energy spectra were obtained by exiting the nanoblocks with a home-arranged femtosecond pulsed two-color pump-probe laser system. The different kinds of metals showed different energy distribution, which helps us to further understand the mechanism of the strong coupling process of the nanocavity.
図・表・数式 / Figures, Tables and Equations
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件