【公開日：2024.07.25】【最終更新日：2024.03.25】
課題データ / Project Data
課題番号 / Project Issue Number
23UT1018
利用課題名 / Title
パターンNi薄膜の形成
利用した実施機関 / Support Institute
東京大学 / Tokyo Univ.
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）革新的なエネルギー変換を可能とするマテリアル/Materials enabling innovative energy conversion（副 / Sub）-
キーワード / Keywords
Hydrogen energy related materials, Power electronics, solid oxide fuel cells,全固体電池/ All-solid battery,スパッタリング/ Sputtering
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
鹿園 直毅
所属名 / Affiliation
東京大学 生産技術研究所
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
Yao Gao,小松洋介,Anna Sciazko,西村勝彦
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
水島彩子
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
Ni-YSZ (Yttria-stabilized zirconia) fuel electrode is widely used in solid oxide fuel cells. It is of vital importance to improve its stability and performance during long term operation. In the present study, to investigate the morphological changes and degradation mechanisms of Ni-YSZ electrode, patterned Ni thin film electrode is sputtered on YSZ pellet using the equipment of the University of Tokyo, Ultrafine lithography nano-measurement center.
実験 / Experimental
Patterned thin film Ni fuel electrode with well-defined triple phase boundary (TPB) was sputtered on the surface of YSZ pellet by using a sputtering machine (CES-4ES, Shibaura, Japan) with a 99.9% purity Ni target. The sputtering was repeated twice with a specially designed steel mask (Geomatec Co. Ltd., Japan) rotated 90 degree after the first sputtering to obtain 1 micron thick Ni film. The sputtering was performed at room temperature under the conditions of Ar atmosphere, pressure of 0.5 Pa and RF power of 300 W.
結果と考察 / Results and Discussion
A one-micron-thick Ni film was precisely fabricated on YSZ pellet using the Ni sputtering method. A patterned Ni-film network, essential for ensuring connectivity, was achieved as depicted in figure 1. This specific patterning of the Ni film aids in the observation of morphological evolution within the fuel electrode.
At the overlapping regions of dual sputtering applications, the thickness of the Ni film was observed to be 2.0 microns, gradually transitioning from 1.0 micron to zero at the periphery of the square region on the exposed surface of YSZ. Consequently, the edge of the sputtered Ni film, interfacing with the open YSZ surface, can be regarded as an active Triple Phase Boundary (TPB) during operation.
The prepared patterned Ni film is intended for future use as a fuel electrode in solid oxide cell degradation experiments. Future studies will employ various sputtering targets to investigate the impact of different metallic materials on the mechanisms of performance degradation in solid oxide cells. This research is significant in the field of solid oxide fuel cell technology, offering insights into the morphological changes of fuel electrodes and exploring the reaction characteristics and durability of different materials under high-temperature conditions. Such investigations are crucial for providing empirical data and theoretical bases for innovations in energy technology, leading to the design of more efficient and durable solid oxide fuel cells by understanding the mechanisms of material reactions and performance degradation.
図・表・数式 / Figures, Tables and Equations
Fig. 1 Top-view microscopic image of Ni mesh (white) on YSZ substrate (dark grey).
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
Reference
Z.
Jiao, N. Shikazono, N. Kasagi, Study on degradation of solid oxide fuel cell
anode by using pure nickel electrode, J Power Sources 196 (2011) 8366–8376.
https://doi.org/10.1016/j.jpowsour.2011.06.069. 落合幸徳様、水島彩子様(東京大学 超微細リソグラフィー・ナノ計測拠点:武田先端知ビルクリーンルーム)に感謝致します
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
-
Zhufeng Ouyang, Influence of Transition Metal Elements on Ni Migration in Solid Oxide Cell Fuel Electrodes, Journal of The Electrochemical Society, 170, 124511(2023).
DOI: 10.1149/1945-7111/ad11b2
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- Tao, J., Sciazko, A., Onishi, J., Ouyang, Z., Komatsu, Y., Yao, G., Okabe, T. and Shikazono, N., "Modeling and prediction of Ni dynamic morphology change in patterned Ni/YSZ electrode," 第32回SOFC研究発表会講演要旨集，2023年12月14－15日
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件