【公開日：2023.08.01】【最終更新日：2023.05.22】
課題データ / Project Data
課題番号 / Project Issue Number
22KT1348
利用課題名 / Title
Quartz結晶基板の切断
利用した実施機関 / Support Institute
京都大学
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）マルチマテリアル化技術・次世代高分子マテリアル/Multi-material technologies / Next-generation high-molecular materials（副 / Sub）量子・電子制御により革新的な機能を発現するマテリアル/Materials using quantum and electronic control to perform innovative functions
キーワード / Keywords
Quartz結晶基板,ダイシングーソー,Sr2RuO4,超伝導/ Superconductivity,異種材料接着・接合技術/ Dissimilar material adhesion/bonding technology
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
前野 悦輝
所属名 / Affiliation
京都大学高等研究院 豊田理研-京大連携拠点(TRiKUC)
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ジョルダノ・マットニ
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）,技術相談/Technical Consultation
利用した主な設備 / Equipment Used in This Project
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
Uniaxial pressure is a powerful tool to modify the properties of materials. In the case of the unconventional superconductor Sr2RuO4, uniaxial pressure can be used to enhance the superconducting transition temperature from 1.5 to about 3.5K. Due to the brittle nature of oxide materials, it is desirable to glue the sample crystal on a substrate material to be used as mechanical support. We are developing a technique that involves using single-crystal quartz as substrate material, over which Sr2RuO4 crystals are glued. To achieve homogeneous transfer of strain to the Sr2RuO4, it is necessary to slice single-crystal quartz with high precision in the desired size. We compared the performance of a dicing saw using different blade grain sizes (2000 vs 400) and obtained information on how to improve this cutting procedure.
実験 / Experimental
Uniaxial pressure is a powerful tool to modify the properties of materials. In the case of the unconventional superconductor Sr2RuO4, uniaxial pressure can be used to enhance the superconducting transition temperature from 1.5 to about 3.5K. Due to the brittle nature of oxide materials, a substrate material to be used as mechanical support for the pressurisation is desirable. We are developing a technique that involves using single-crystal quartz as substrate material, over which Sr2RuO4 crystals are glued (Fig. 1). To achieve homogeneous transfer of strain to the Sr2RuO4, it is necessary to slice single-crystal quartz with high precision in the desired size.
結果と考察 / Results and Discussion
For our experiment, it is highly important to obtain quartz pieces with straight edges. Due to the high width-to-length ratio of the desired quartz slices, the material is prone to fracture upon dicing. For this reason, we tested two different cutting blades for the dicing saw (Fig. 2). Blade B1A gave a high yield of quartz pieces (about 90% usable slices), with minimum amount of fracture, but the quartz edges showed extensive chipping with size in the 0.05 mm range. Blade ZP07 produced quartz pieces with minimal chipping, but the yield was lower (only 10% of the pieces were usable) as most pieces broke during dicing. It seems that finer blade grain (2000 vs 400) reduces the amount of edge chipping. However, finer grain is prone to picking up broken quartz fragments during slicing that are responsible for quartz fracturing. For future experiments, a blade dressing procedure can be used to clean the blade after a few cuts.
図・表・数式 / Figures, Tables and Equations
Fig.1: Uniaxial pressure on Sr2RuO4 thin samples require precisely sliced single-crystal quartz substrates as support material
Fig.2: Resulting quartz pieces diced in the NanoHub.
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
G. Mattoni, S. Matsubara, M. Waqee-ur-Rehman, S. Yonezawa, Y. Maeno,"Control of Sr2RuO4 Superconducting State with Uniaxial Pressure"International workshop “Oxide Superspin 2022(OSS2022)”, Vietri sul Mare, Italy, 2022/Dec/14-18 Oral-preview and poster presentations
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件