【公開日：2023.07.31】【最終更新日：2023.04.21】
課題データ / Project Data
課題番号 / Project Issue Number
22UT1066
利用課題名 / Title
The formation of pattern Ni thin film
利用した実施機関 / Support Institute
東京大学
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）革新的なエネルギー変換を可能とするマテリアル/Materials enabling innovative energy conversion（副 / Sub）-
キーワード / Keywords
燃料電池、Ni、エネルギー関連技術,スパッタリング/Sputtering,蒸着・成膜/Evaporation and Deposition,燃料電池
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
鹿園 直毅
所属名 / Affiliation
東京大学生産技術研究所
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
Gao Yao,Zhufeng Ouyang,Anna Sciazko
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
Nickel yttria-stabilized zirconia (Ni-YSZ) fuel electrode is widely used in solid oxide fuel cells. It is of vital importance to improve its stability and performance during long term operation. In the present study, to investigate the morphological changes and degradation mechanisms of Ni-YSZ electrode, patterned Ni thin film electrode is sputtered on YSZ pellet using the sputtering machine of Advanced Research Infrastructure for Materials and Nanotechnology in Japan.
実験 / Experimental
Patterned thin film Ni fuel electrode with well-defined triple phase boundary (TPB) was sputtered on the surface of YSZ pellet by using a sputtering machine (CES-4ES, Shibaura, Japan) with a 99.9% purity Ni target. The sputtering was repeated twice with a specially designed steel mask (Geomatec Co. Ltd., Japan) rotated 90o after the first sputtering to obtain 1 µm-thick Ni film. The sputtering was performed at room temperature under the conditions of Argon atmosphere, pressure of 0.5 Pa and RF power of 300 W.
結果と考察 / Results and Discussion
One micron thick Ni film was fabricated by Ni sputtering method on a YSZ pellet. A patterned Ni-film network was obtained to ensure the connectivity as shown in figure 1. The specific patterned Ni-film facilitates the observation of morphological evolution of fuel electrode. The thickness of Ni-film at overlapping region of two sputterings was 2.0 micron and transiently change from 1.0 micron to 0 at the edge of the square region of YSZ open surface. The edge of sputtered Ni-film contacting with open YSZ surface thus can be treated as active TPB in operation. The as-prepared patterned Ni will be used as fuel electrode in the future solid oxide cell degradation tests. In the future, different sputtering target will be used to investigate the effect of different metal materials on the mechanisms of solid oxide cell performance degradation.
図・表・数式 / Figures, Tables and Equations
Fig. 1 Top-view microscopic image of Ni mesh (white) on YSZ substrate (dark grey).
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
共同研究者：東京大学生産技術研究所
小松洋介, Anna Sciazko, 西村勝彦.
落合幸徳様、水島彩子様(東京大学 超微細リソグラフィー・ナノ計測拠点)に感謝致します.
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- 欧陽 朱峰, Anna Sciazko, 小松 洋介, 西村 勝彦, 鹿園 直毅, “固体酸化物形燃料電池燃料極のNi移動に及ぼす遷移金属元素の影響”第31回SOFC研究発表会, 令和4年12月16日．
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件