【公開日：2023.07.31】【最終更新日：2023.05.09】
課題データ / Project Data
課題番号 / Project Issue Number
22UT1035
利用課題名 / Title
Fabrication of Diamond Like Carbon (DLC) based superhydrophobic surface
利用した実施機関 / Support Institute
東京大学
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）-
キーワード / Keywords
表面処理，撥水親水,リソグラフィ/Lithography,EB,高品質プロセス材料/ High quality process materials
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
大宮司 啓文
所属名 / Affiliation
東京大学
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
Shamim Jubair Ahmed,髙橋 幸成
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
UT-500：高速大面積電子線描画装置
UT-600：汎用ICPエッチング装置
UT-603：汎用高品位ICPエッチング装置
UT-604：高速シリコン深掘りエッチング装置
UT-855：高精細電子顕微鏡
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
We fabricated DLC based superhydrophobic surface (SHS) to conduct wetting transition experiment with evaporating water drop. In 2021, we developed and finalized the recipe for SHS fabrication. In 2022, we made several samples of SHS for different micropillar thickness (t =3 and 25 µm), pitch (p =9, 15 and 75 µm) and height (h1 = 3, 6 and 8 µm). An illustration of t, p and h1 are shown in Fig. 1.
実験 / Experimental
Process of DLC surface fabrication is given below: i. Deposit DLC thin film (10 µm thick) on Si wafer by CVD (performed outside of Takeda). ii. Cleave the wafer into 2*2 cm chip manually. iii. Organic cleaning using Acetone, ethanol, and water. iv. Sputtering of Al hard mask (100 nm thick) using SIH-450 ULVAC. v. O2 plasma ashing to improve adhesion of surface. vi. Spin coat of OAP (0 rpm/1sec. – 500rpm/5sec. – 3,000rpm/30sec.) and ZEP520A (0 rpm/1sec. - 500rpm/5sec. – 4,000rpm/60sec.) as EB resist. vii. EB lithography (ADVANTEST F5112+VD01), dose: 104 C/cm2. viii. Development: ZND-50 60sec., MIBK 10sec., IPA 10sec., dry with N2 gun. ix. Etching of Al hard mask (Cl2 plasma) with ICP-RIE ULVAC NE-550 (etching time 45 sec.) x. Etching of DLC layer (O2 plasma) with ICP-RIE-ULVAC CE-300I. (Etching rate approximately 0.38 µm per minute). xi. Removal of Al hard mask and resist by chemical etching (Al etchant was used for 5 min) xii. Teflon coat of pillars with DRIE SPPT MUC-21 ASE Pegasus. (Film thickness 50 nm and depo time 30 sec.) xiii. Check the micropillar dimensions in SEM.
結果と考察 / Results and Discussion
Below we show the SEM images of various DLC based SHS we made in 2022. Fig. 2 shows 45-degree SEM images of the micropillar array of the five surfaces made under this study. Fig. 3 shows 90-degree SEM image of the typical micropillars made under this study.
図・表・数式 / Figures, Tables and Equations
Fig. 1 The illustration of DLC based superhydrophobic surface (SHS)
Fig. 2 The SEM images of various DLC based SHS we made in 2022.
Fig. 3 The 90-degree SEM image of the typical micropillars made under this study.
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
-
Jubair A. Shamim, Suppression of wetting transition on evaporative fakir droplets by using slippery superhydrophobic surfaces with low depinning force, Scientific Reports, 13, (2023).
DOI: 10.1038/s41598-023-29163-1
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- Shamim, J.A., Goswami, A., Takahashi, Y., Shaukat, N., Hsu, W.-L., Choi, J., Daiguji, H., “Suppression of wetting transition on evaporative fakir droplets by using slippery superhydrophobic surfaces with low depinning force,” JSME Thermal Engineering Conference, Oct. 9-10, 2022, Tokyo, Japan.
- Takahashi, Y., Shamim, J.A., Shaukat, N., Mouterde, T., Hsu, W.-L., Choi, J., Daiguji, H., “Development of Superhydrophobic Surfaces Toward a Delayed Cassie-Baxter to Wenzel Transition”, JSRAE Annual Conference, Sep. 7-9, 2022, Okayama, Japan.
- Shamim, J.A., Goswami, A., Takahashi, Y., Shaukat, N., Hsu, W.-L., Daiguji, H., “Wetting transition of evaporating fakir drop on microstructured superhydrophobic surfaces: Model development and validation in surface evolver,” 16th International Conference on Heat Transfer, Fluid Mechanics, and Thermodynamics (HEFAT), Aug. 8-10, 2022 (virtual).
- Shamim, J.A., Takahashi, Y., Mouterde, T., Hsu, W.-L., Choi, J., Daiguji, H., “Pressure-driven wetting transition of evaporating droplets on textured Diamond-like-carbon substrates,” The 59th Japan Heat Transfer Symposium, May 18-20, 2022, Gifu, Japan.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件