【公開日：2023.07.28】【最終更新日：2023.05.29】
課題データ / Project Data
課題番号 / Project Issue Number
22AT0403
利用課題名 / Title
導電性AFMカンチレバーの作製
利用した実施機関 / Support Institute
産業技術総合研究所
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）その他/Others（副 / Sub）-
キーワード / Keywords
Atomic Force Microscope (AFM), カンチレバー, FIB technique
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
内田 紀行
所属名 / Affiliation
産業技術総合研究所
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
Leonid Bolotov
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）技術代行/Technology Substitution（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
Fabrication of sharp conductive AFM cantilevers with tungsten wires and angle control.
実験 / Experimental
【利用した主な装置】
集束イオンビーム加工観察装置(FIB)
【実験方法】
To
improve the spatial resolution of an Atomic Force Microscope (AFM) to
mechanical strength and electric current, conductive AFM cantilevers were prepared
with W wires and conical angle control below 25°.
結果と考察 / Results and Discussion
FIB
technique is critically useful when sub-µ precision and delicate handling are
needed. The preparation includes 3 stages: (1) pick up a φ10 µm
x 100 µW wire cut, (2) precise attachment of the wire cut, (3) sharpening one end
of the attached wire.
On
stage (2) the shape of the wire end was adjusted to match the AFM sensor
position. The wire was fixed by FIB deposition under control of the place and
orientation on an AFM sensor. The FIB bonding produces the required mechanical
strength and electric conduction between the wire and the sensor. (Fig. 1)
On stage (3), etching of the free end of the wire was used
to decrease the wire diameter from φ10µm to φ10
nm, and a length of ~50 µm. To control the conical angle, the tilting of the AFM
sensor was performed in 12 - 16 positions before completion. Either black or
gray grains at the end were selected for improvement. (Fig. 2)
図・表・数式 / Figures, Tables and Equations
Fig.1 SIM image of the W wire attached to an AFM sensor (bottom) after stage (2).
Fig.2 SIM image of AFM cantilevers with 5° (right) (2022-12-07), a 25° angle (left). (2023-02-03)
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
・I am grateful Mr. Masanori Iitake (AIST-NPF) for assistance.
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件