【公開日：2023.07.31】【最終更新日：2023.05.29】
課題データ / Project Data
課題番号 / Project Issue Number
22UT0418
利用課題名 / Title
SiCの表面分析
利用した実施機関 / Support Institute
東京大学 / Tokyo Univ.
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）計測・分析/Advanced Characterization（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）次世代ナノスケールマテリアル/Next-generation nanoscale materials（副 / Sub）その他/Others
キーワード / Keywords
SiC, electrical discharge machining,イオンミリング/Ion milling,メソポーラス材料/ Mesoporous material
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
Lin JIANG
所属名 / Affiliation
東京大学
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
Observation of SiC’s cross-section machined by EDM under different discharge energies.
実験 / Experimental
Machine the SiC using EDM;Take the workpiece to the ion beam system; (only this process is done in the ARIM)Observe the side surface by SEM.
結果と考察 / Results and Discussion
The machining efficiency of SiC is higher than that of steel under high discharge energy, and the machining efficiency of SiC is lower than that of steel under low discharge energy. Thermal cracks caused by thermal stress play the main role in removal under large discharge energy. However, when discharge energy is low enough, melting and evaporation play the main role in the removal of single crystal SiC. Tool wear results can match the conclusion. Observation experiments prove the current density of the LC pulse generator works on the SiC surface in higher compared to that of the RC pulse generator, which is the reason why ramp-down discharge current pulse shapes show higher machining efficiency; The tool wear ratio is larger when using a positive pole connecting to a SiC ingot than a negative pole connecting to a SiC ingot; Under the same feed depth, the maximum constant feed speed is larger when using a positive pole connecting to SiC ingot; And LC pulse generator can reduce the influences of material resistance which makes the machining consistent and stable no matter the positions of discharge points. However, the machining performance is influenced by the position of the discharge point when using the pulse generator inside the machine tool.
図・表・数式 / Figures, Tables and Equations
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
None.
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件