【公開日：2023.07.31】【最終更新日：2023.05.17】
課題データ / Project Data
課題番号 / Project Issue Number
22UT0390
利用課題名 / Title
gas sensor
利用した実施機関 / Support Institute
東京大学
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）計測・分析/Advanced Characterization（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）-
キーワード / Keywords
電子顕微鏡/Electron microscopy,EB,IoTセンサ/ IoT sensor
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
Zang Chuanlai
所属名 / Affiliation
東京大学
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
To confirm the surface structure and element distribution, I used the JEOL JSM-7800F SEM to check the SEM figure and EDS mapping.
実験 / Experimental
An electron beam lithography was performed to fabricate single-nanowire gas sensors using four metal oxide materials. Scanning electron microscopy (SEM) was then used to observe the surface morphology and size of the nanowires, and energy-dispersive spectroscopy (EDS) was employed to analyze the elemental distribution of the nanowires.
結果と考察 / Results and Discussion
The electron beam lithography process involved depositing a thin film of the metal oxide material onto a substrate and then using a focused electron beam to etch patterns into the material to create nanowires with desired dimensions. Four different metal oxide materials were used, including tin oxide (SnO2), zinc oxide (ZnO), indium oxide (In2O3), nickel oxide (NiO) .etc.SEM imaging showed that the nanowires had a uniform and smooth surface, with diameters ranging from 50-100 nanometers. The length of the nanowires varied, with some reaching up to several microns in length. EDS analysis revealed that the nanowires had a homogeneous elemental distribution, with no significant segregation of elements observed. The results confirmed that the four metal oxide materials were of high purity, with only minor trace elements present.
図・表・数式 / Figures, Tables and Equations
Fig. 1
Fig. 2
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
・Chuanlai Zang, et al.SnO2–CuO heterostructured nanofibers for enhanced NH3-gas-sensing performance and potential application in breath analysis. (submitted to IEEE Sensor Journal, under review)・Chuanlai Zang, et al. Electronic nose based on multiple electrospinning nanofibers Sensor array and application in gas classification (plan to submit to Frontier in Sensors)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- Chuanlai Zang, et al. Electronic Nose based on MOS Nanowires Gas Sensor Array for Breath Analysis Application. Poster presented at: The American Physical Society (APS) March Meeting; March 5-10 2023; Las Vegas, NV.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件