【公開日：2023.07.31】【最終更新日：2023.05.23】
課題データ / Project Data
課題番号 / Project Issue Number
22UT0088
利用課題名 / Title
The fundamental research of DLC related films for high performance and durable TENG（ナノ発電機）
利用した実施機関 / Support Institute
東京大学 / Tokyo Univ.
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）計測・分析/Advanced Characterization（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）-
キーワード / Keywords
Si-DLC,電子顕微鏡/Electron microscopy,X線回折/X-ray diffraction,IoTセンサ/ IoT sensor
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
GAO Mang
所属名 / Affiliation
東京大学
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
UT-102：高分解能走査型分析電子顕微鏡
UT-202：高輝度In-plane型X線回折装置
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
I use SEM mainly to observe the surface of Si-DLC after the friction test. I use XRD mainly to detect the crystal component of TiOx deposited on the Si wafer.
実験 / Experimental
Experiment1: I have 2 samples, Si-DLC after the abrasion test with PTFE, I want to detect the surface situation after the test and the element component remains on the surface.Experiment2: I deposited several TiOx on the surface of the Si wafer, I want to know whether I got the rutile component among the film.
結果と考察 / Results and Discussion
Transferred layers of TMS 8 and H-DLC on Al
substrates under water-lubricated conditions were observed with scanning electron
microscope (SEM) (Figure S12), and the composition of the
transferred layers was further identified with energy-dispersive X-ray spectroscopy (EDS) (Figure S13).
It was confirmed that transferred layers were originated from PTFE debris.
Figure S12. SEM image of TMS 8 and
H-DLC on Al substrate before and after durability tests under water-lubricated conditions.
(a) TMS 8 before durability test. (b) TMS 8 with PTFE debris after durability
test. (c) H-DLC before durability test. (d) H-DLC with PTFE debris after durability
test.
Figure S13. EDS results of (a) TMS 8 and (b) H-DLC on Al substrates after
durability tests under water-lubricated conditions.
図・表・数式 / Figures, Tables and Equations
Figure S12. SEM image of TMS 8 and H-DLC on Al substrate before and after durability tests under water-lubricated conditions. (a) TMS 8 before durability test. (b) TMS 8 with PTFE debris after durability test. (c) H-DLC before durability test. (d) H-DLC with PTFE debris after durability test.
Figure S13. EDS results of (a) TMS 8 and (b) H-DLC on Al substrates after durability tests under water-lubricated conditions.
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
-
Mang Gao, Triboelectric nanogenerator with enhanced output and durability based on Si-DLC films, Nano Energy, 105, 107997(2023).
DOI: https://doi.org/10.1016/j.nanoen.2022.107997
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件