【公開日：2023.07.31】【最終更新日：2023.05.16】
課題データ / Project Data
課題番号 / Project Issue Number
22UT0059
利用課題名 / Title
二次元材料におけるナノポアの作成
利用した実施機関 / Support Institute
東京大学
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）計測・分析/Advanced Characterization（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）革新的なエネルギー変換を可能とするマテリアル/Materials enabling innovative energy conversion（副 / Sub）次世代ナノスケールマテリアル/Next-generation nanoscale materials
キーワード / Keywords
電子顕微鏡/Electron microscopy,EB,熱電材料/ Thermoelectric material,原子層薄膜/ Atomic layer thin film
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
徐 偉倫
所属名 / Affiliation
東京大学
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
Chun-Yen Lee,Takayuki Moriga,Zhixuan Wang
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）技術補助/Technical Assistance（副 / Sub）,機器利用/Equipment Utilization
利用した主な設備 / Equipment Used in This Project
UT-002：軽元素対応型超高分解能走査透過型電子顕微鏡（Cs-STEM）
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
We conducted nanopore milling on suspended monolayer molybdenum disulfide (MoS2) flakes under scanning transmission electron microscopy for high resolution nanopore molecule sensing.
実験 / Experimental
Sub 10-nm nanopores ranging from 0.7 nm to 7 nm were drilled on monolayer MoS2 using a combination of Ronchigram adjustment and ultra-fine electron beams. The use of these techniques allowed for the precise control of nanopore shape, resulting in well-defined circular structures.
結果と考察 / Results and Discussion
The drilled circular nanopores are particularly beneficial for ssDNA sensing experiments, as the shape may affect the resolution of molecule sensing. Moreover, the circular shape of the nanopores makes them an ideal candidate for the study of surface charge properties. One of the key advantages of this technique is that it allows for the production of circular nanopores without sacrificing the crystallinity of the MoS2 material. This finding suggests that high-quality nanopores can be produced while still maintaining the material properties necessary for optimal sensing performance. Overall, the results of this study provide important guidance to the design and optimization of nanopore-based DNA sensing technologies. On the other hand, by enabling the fabrication of circular nanopores with high crystallinity, this technique demonstrates the great potential to improve the performance of future nanopore sensors.
図・表・数式 / Figures, Tables and Equations
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
We would like to express our sincere appreciation to Morita Mari san for the tremendous technical support. This research was supported by the Greater Tokyo Innovation Ecosystem GAP Fund.
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：1件
特許登録件数 / Number of Registered Patents：0件