【公開日：2023.07.28】【最終更新日：2023.04.27】

課題データ / Project Data

課題番号 / Project Issue Number

22TU0061

利用課題名 / Title

Thermoelectric generators for self-powered sensing system

利用した実施機関 / Support Institute

東北大学 / Tohoku Univ.

機関外・機関内の利用 / External or Internal Use

内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-

【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）-

キーワード / Keywords

パワーエレクトロニクス,蒸着・成膜/Evaporation and Deposition,CVD,スパッタリング/Sputtering,成形/Molding,リソグラフィ/Lithography,膜加工・エッチング/Film processing and Etching,アクチュエーター/ Actuator,高周波デバイス/ High frequency device,パワーエレクトロニクス/ Power electronics,MEMSデバイス/ MEMS device,IoTセンサ/ IoT sensor,ナノフォトニクスデバイス/ Nanophotonics device,ナノエレクトロニクスデバイス/ Nanoelectronics device

利用者と利用形態 / User and Support Type

利用者名（課題申請者）/ User Name (Project Applicant)

Van Toan Nguyen

所属名 / Affiliation

Microsystem Integration Center, Tohoku University

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

Takahito Ono, Masaya Toda

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

利用形態 / Support Type

（主 / Main）機器利用/Equipment Utilization（副 / Sub）-

利用した主な設備 / Equipment Used in This Project

TU-268：光造形3Dプリンター
TU-056：両面アライナ
TU-051：ミカサ スピンコータ
TU-201：DeepRIE装置#1
TU-052：アクテス スピンコータ#1

報告書データ / Report

概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)

This work aims to develop a high-performance flexible thermoelectric generator and its application for a self-powered wireless sensing system.

実験 / Experimental

Thermoelectric material is synthesized by an electrodeposition technique that utilizes a three-electrode system. A flexible polyimide substrate is employed. Thermoelectric elements are aligned on the polyimide substrate and fixed by the soldering method.

結果と考察 / Results and Discussion

Ultra-flexible thermoelectric generator (TEG) has been fabricated successfully, as shown in Figure 1. A high output voltage of 1.3 V is observed under a temperature difference ΔT of 52 ◦C. Its maximum output power and power density are 95.9 mW and 610.8 μW/cm2 , respectively, under the same above ΔT. Furthermore, two practical applications utilizing the fabricated flexible TEG have been successfully conducted. First, heat waste from an electric thermos pot is converted into electricity and used as an electrical power source for electronic devices. Second, a self-power wireless BLE sensing system driven by thermal heat waste is demonstrated.

図・表・数式 / Figures, Tables and Equations

Fig. 1. (a) TEG in the flat mode. (b) TEG in the flexible mode.

その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)

・参考文献
N.V. Toan, Energy reports,8, 5026-5037, 2022.
N.V.Toan, Journal of Power Sources, 536, 231504, 2022.
N.V.Toan, Energy conversion and management,264, 115760, 2022.

成果発表・成果利用 / Publication and Patents

論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)

口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.

特許 / Patents

特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件