【公開日：2023.07.28】【最終更新日：2023.04.27】
課題データ / Project Data
課題番号 / Project Issue Number
22TU0057
利用課題名 / Title
IoT for Safety & Security, multi focused ion beam using ion species generated from ionic liquid / IoT for Safety & Security, multi focused ion beam using ion species generated from ionic liquid
利用した実施機関 / Support Institute
東北大学 / Tohoku Univ.
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）革新的なエネルギー変換を可能とするマテリアル/Materials enabling innovative energy conversion
キーワード / Keywords
Energy harvesting,スパッタリング/Sputtering,MEMSデバイス/ MEMS device,IoTセンサ/ IoT sensor
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
Minh Le Van
所属名 / Affiliation
東北大学未来科学技術共同研究センター
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
TU-255：ディスコ ダイサ
TU-160：自動搬送 芝浦スパッタ装置（加熱型）
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
For developing MEMS devices towards to “Internet of Things (IoTs) for safety and Security“ and Si-micromachining multi-focused ion source under the project „multi-focused ion beam using ion species generated from ion liquid“, it is crucial to establish cost-effectively micromachining process. We partially use the facility at the Center for Integrated Nano Technology Support (CINTS, Tohoku University) to conduct our experiments
実験 / Experimental
We mainly used the following research tool: Shibaura Mechatronics i-Miller CFS-4EP-LL, F-TU-075).
【実験方法-Experimental method】
Our 500-µm Si and SUS wafers were cleaned by standard clean procedure and were deposited various metal thin films – Pt (200 nm)/Ti (5 nm) for a bottom electrode and a seed layer, Au (200 nm)/Cr (5 nm) or Au (200 nm)/Ti (5 nm) for a top electrode, and Ni (600 nm) for a hard mask of AlN dry etching process.
The based pressure was kept below 5x10-4Pa and the substrates were heated up to 200oC for Pt/Ti films. For the metal thin films, the depositions were conducted at Ar pressure of 0.5 Pa and RF power of 300 W for Au, Ni, and Pt and 100 W for Ti and Cr.
結果と考察 / Results and Discussion
Since Pt/Ti films with low residual stress and a small full width at half maximum (FWHM) of (111)-Pt rocking curve were crucial for our AlN development. Figure 1 shows our typical rocking-curve FWHM of 2.3 deg. Figure 2 shows a CCD camera microscope at our laboratory to observe the Au/Cr film surface images.
図・表・数式 / Figures, Tables and Equations
Fig. 1 X-ray diffraction rocking curve scanning of (111) Pt thin film on Si wafer.
Fig. 2 CCD microscopic images of the typical Au/Cr as-deposited surface (a), after forming micro-hole (b).
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
Acknowledgement
・Grant-in-Aid for Scientific Research (B) 21H01777「Study of multi-focused ion beam using ion species generated from ion liquid」
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
-
Le Van Minh, Piezoelectric Tantalum Aluminum Nitride Grown on Stainless Steel for Low-Frequency Vibration-Driven Energy Harvesters, 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), , 154-157(2022).
DOI: 10.1109/PowerMEMS56853.2022.10007086
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- 1. "Piezoelectric Tatalum aluminum nitride grown on stainless steel for low-frequency vibration-driven energy harvesters"; Dec. 2022 - The 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), USA; Le Van Minh, Hiroki Kuwano
- 2. "EMIM-BF4 multi-ion sources of micromachined Si external wetted emitters with fluidic feeding-flow confinement: from microfabrication to Si etching evaluation"; Mar. 2022 -The 69th Japanese Society of Applied Physics (JSAP) Spring Meeting 2022, Kanagawa, Japan; Le Van Minh, Nguyen Van Chinh, Hiroki Kuwano
- 3. "Vibration-driven micro energy harvesting with piezoelectric materials for IoTs and SDGs"; Apr. 2022 - The 5th International Conference on Advanced Materials and Nanotechnology, Hanoi, Vietnam; Hiroki Kuwano, Le Van Minh, Nguyen Hoang Hung (invited)
- 4. "Piezoelectric wurtzite nitride thin films for green, high-performance MEMS applications"; Nov. 2022 - The 5th International Conference on Advanced Materials and Nanotechnology, Hanoi, Vietnam; Le Van Minh, Hiroki Kuwano (invited)
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：1件