Around Si processing line, the micro-/nano-processing of III-V, carbon, magnetic materials can be dealt with. Inside members fabricate solar cells, nano-structures/devices, and MEMS. Technical advice and proxy processing service can be given. There are many experiences of training course with the practice and supporting companies.
The clean room is open to the platform users. Si micromachining facilities (3-4 inches) realize variety of devices. Based on this advantage, nano-materials, or nano-devices are studied by inside members, who will support the relating studies. Not only Si but also III-V, carbon, magnetic, and organic materials are processed realizing the hybrid combinations. The facilities are maintained by three experienced technical staffs, who can teach the operation or give the processing service as a proxy. Inside team members fabricate solar cells, nano-structures/devices, MEMS having a lot of know-how of fabrication/analysis. In addition to the registered equipments, many other equipments can be used. The analysis and evaluation of samples are also possible at one place using nano-probe microscopes and X-ray analysis machines, for example. Our location is inside Nagoya city collaborating with Nagoya University covering Chubu area.
|Electron-beam drawer||Oxidation / Diffusion furnace|
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|Mask aligner||Course of lectures|
Research Supporting Group, Toyota Technological Institute
2-12-1 Hisakata, Tenpaku-ku, Nagoya, Aichi 468-8511, Japan
+81-(0)52-809-1725, FAX +81-(0)52-809-1721
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