The sole nanotech research support organization of Shikoku island
(Kagawa University)

A series of nano/micro-fabrication and evaluation devices are arranged for 4-inch wafer and various materials such as silicon and resins. Many users in enterprises and science research laboratories are using the only series of equipment offered in the Shikoku region.


Contact to this institute
【Contact details】
 +81-(0)87-887-1873
  nanoplatform(at)ao.kagawa-u.ac.jp
  (*Please replace "(at)" with @.)

About this institute

A series of nano/micro-fabrication and evaluation devices are arranged for 4-inch wafer and various materials such as silicon and resins. State-of-the-art nano/micro-fabrication and integration technologies are offered to the user by skilled professional assistants and the researcher group. Users are supported to develop and evaluate devices in various service forms. Many users in enterprises and science research laboratories are using the only series of equipment offered in the Shikoku region. The researcher group, which has a vast amount of information on research results and technologies, receives technological consultation concerning the fabrication and evaluation of the devices from users.




Electron beam lithography systemMask lithography system
  
LP-CVDOptical 3D profiling system

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Facilities

Contact

Support Office for Nanotechnology, 
Center for Social Collaboration and Intellectual Property, 
Kagawa University
2217-20, Hayashi-cho, Takamatsu, Kagawa 761-0396, Japan
 +81-(0)87-887-1873
  nanoplatform(at)ao.kagawa-u.ac.jp
  (*Please replace "(at)" with @.)