FAIS Semiconductor Center
(Kitakyushu Foundation for the Advancement of Industry , Science and Technology(FAIS))
The Semiconductor Center in Kitakyushu Science and Research Park has various microfabrication equipment for the research and development of IC-MEMS related devices, and has widely opened to companies, universities, and research institutions, etc. This equipment and nanotechnology are hoped to be utilized in the fields of biotechnology, life science, and environmental technology. The Center has been striving to build the environment easy to use not only for microfabrication related researchers of companies and universities, but also for researchers in different fields (biotechnology, medicine).
About this institute
Content of Services
- CMOS consistent prosess support
Applying design rules based on the Center's unique CMOS1 μm, the Center supports research and development consistently from circuit design, photomask fabrication, wafer process, assembly and testing process, and characterization to failure analysis.
- MEMS nano-technology support
The Center supports manufacturing three-dimensional structure consisted of Si based materials mainly (microbrige, cantilever, SiN independence film, etc.) and microdisplacement sensor. Also the Center supports research and development of numerous processes for Si and various MEMS devices used crystal, quartz and sapphire substrates.
- Human resources development
The Center conducts the education which enables human resource to create highly practical applications applied nanotechnology, along with basic education in order to use equipment safely such as safety training and operation training. The education is carried out through IC-MEMS related training seminar.
|Work scenery in the yellow room |
(Operation of the exposure apparatus)
|Trial manufacture example of the CMOS |
*3.2mm square chip
(There are circuits of 10 users on 6 chips)
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|Trial manufacture example of the MEMS|
(Micro displacement sensor)
|Scenery of human resources development|
(Training of the process for manufacturing IC chip)
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Kitakyushu Foundation for the Advancement of Industry , Science and Technology
1-5 Hibikino, Wakamatsu-ku, Kitakyushu-shi, Fukuoka 808-0135, Japan
+81-(0)93-695-3600, FAX +81-(0)93-695-3609
(*Please replace "(at)" with @.)