Nano-Processing Facility, NPF, is an open user facility to spur interdisciplinary researches and to promote human resource development. NPF provides a chance to utilize the most advanced equipment for nano-fabrication, packaging, device prototyping, material and device characterizations and so on.
AIST Nano-Processing Facility (AIST-NPF) is an open user facility to spur interdisciplinary and emerging researches in various fields, such as nano-electronics, nano-materials, N&MEMS, photonics, biotechnology, and energy and environment technologies. NPF provides a chance to utilize the most advanced equipment for nano-fabrication, packaging, device prototyping, materials and device characterizations and so on, and various services, such as technical consultation, shared-use, technical support and assistance for creating value of users. At the same time, NPF provides hospitable services, including equipment training with our skillful engineers and rich curriculums for nanotechnology human resource development. In NPF, users can handle samples with irregular shapes, as well as wafer-type samples with the size of 3 to 8 inches. Scaling-up to the larger-size wafer and processing to the integrated circuit are also available by constructing the bypass process in cooperation with a research network as well as research institutes within AIST.
|Course of lectures||Training course of EB lithography|
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|Technical assistance for SEM observation||Nano-structures fabricated and observed by FIB|
National Institute of Advanced Industrial Science and Technology
Nano-Processing Facility (NPF)
Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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